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dc.contributor.authorPişkin, Fatih
dc.date.accessioned2022-07-04T06:36:32Z
dc.date.available2022-07-04T06:36:32Z
dc.date.issued2022en_US
dc.identifier.citationPişkin, F. Fabrication of BaZr0.80Y0.20O3 – δ Sputtering Target for Thin-Film Proton Conducting Oxides. Russ. J. Inorg. Chem. (2022). https://doi.org/10.1134/S0036023622080216en_US
dc.identifier.issn0036-0236 / 1531-8613
dc.identifier.urihttps://hdl.handle.net/20.500.12809/10065
dc.description.abstractA systematic work was carried out to fabricate a phase-pure sputter target for thin film deposition of BaZr0.80Y0.20O3 - delta. The current study mainly involves two parts; i.e. determination of the ideal parameters for phase-pure BaZr0.80Y0.20O3 - delta synthesis, and the production of sputter target with a 2-inch diameter using deformable compaction die. For the synthesis, the effect of chelating and polymerization agents on the Pechini synthesis of BaZr0.80Y0.20O3 - delta was investigated in detail. Ethylenediaminetetraacetic acid and citric acid as chelating agents were employed with different fractions, while ethylene glycol was preferred as a polymerization agent. The effect of calcination temperature ranging between 1000 and 1200 degrees C was also investigated so as to eliminate the secondary phase formation. Subsequent to powder synthesis, the BaZr0.80Y0.20O3 - delta sputter target having over 90% of its theoretical density was produced following powder pressing using deformable compaction die up to 150 MPa and sintering at 1500 degrees C for 10 hours. BaZr0.80Y0.20O3 - delta sputter target produced was then tested for a thin film deposition in a magnetron sputtering system for 12 h. Investigations carried out on the thin films deposited revealed that fully dense and highly textured crystalline BaZr0.80Y0.20O3 - delta films could be deposited with the target produced in the study.en_US
dc.item-language.isoengen_US
dc.publisherMAIK NAUKA/INTERPERIODICA/SPRINGERen_US
dc.relation.isversionof10.1134/S0036023622080216en_US
dc.item-rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subjectProton-conducting oxidesen_US
dc.subjectBaZrO3-based membranes,en_US
dc.subjectMagnetron sputteringen_US
dc.subjectSputter targeten_US
dc.subjectThin filmsen_US
dc.titleFabrication of BaZr0.80Y0.20O3-delta Sputtering Target for Thin-Film Proton Conducting Oxidesen_US
dc.item-typearticleen_US
dc.contributor.departmentMÜ, Mühendislik Fakültesi, Metalurji ve Malzeme Mühendisliği Bölümüen_US
dc.contributor.authorID0000-0002-5321-0381en_US
dc.contributor.institutionauthorPişkin, Fatih
dc.relation.journalRUSSIAN JOURNAL OF INORGANIC CHEMISTRYen_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US


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