dc.contributor.author | Pişkin, Fatih | |
dc.date.accessioned | 2022-07-04T06:36:32Z | |
dc.date.available | 2022-07-04T06:36:32Z | |
dc.date.issued | 2022 | en_US |
dc.identifier.citation | Pişkin, F. Fabrication of BaZr0.80Y0.20O3 – δ Sputtering Target for Thin-Film Proton Conducting Oxides. Russ. J. Inorg. Chem. (2022). https://doi.org/10.1134/S0036023622080216 | en_US |
dc.identifier.issn | 0036-0236 / 1531-8613 | |
dc.identifier.uri | https://hdl.handle.net/20.500.12809/10065 | |
dc.description.abstract | A systematic work was carried out to fabricate a phase-pure sputter target for thin film deposition of BaZr0.80Y0.20O3 - delta. The current study mainly involves two parts; i.e. determination of the ideal parameters for phase-pure BaZr0.80Y0.20O3 - delta synthesis, and the production of sputter target with a 2-inch diameter using deformable compaction die. For the synthesis, the effect of chelating and polymerization agents on the Pechini synthesis of BaZr0.80Y0.20O3 - delta was investigated in detail. Ethylenediaminetetraacetic acid and citric acid as chelating agents were employed with different fractions, while ethylene glycol was preferred as a polymerization agent. The effect of calcination temperature ranging between 1000 and 1200 degrees C was also investigated so as to eliminate the secondary phase formation. Subsequent to powder synthesis, the BaZr0.80Y0.20O3 - delta sputter target having over 90% of its theoretical density was produced following powder pressing using deformable compaction die up to 150 MPa and sintering at 1500 degrees C for 10 hours. BaZr0.80Y0.20O3 - delta sputter target produced was then tested for a thin film deposition in a magnetron sputtering system for 12 h. Investigations carried out on the thin films deposited revealed that fully dense and highly textured crystalline BaZr0.80Y0.20O3 - delta films could be deposited with the target produced in the study. | en_US |
dc.item-language.iso | eng | en_US |
dc.publisher | MAIK NAUKA/INTERPERIODICA/SPRINGER | en_US |
dc.relation.isversionof | 10.1134/S0036023622080216 | en_US |
dc.item-rights | info:eu-repo/semantics/closedAccess | en_US |
dc.subject | Proton-conducting oxides | en_US |
dc.subject | BaZrO3-based membranes, | en_US |
dc.subject | Magnetron sputtering | en_US |
dc.subject | Sputter target | en_US |
dc.subject | Thin films | en_US |
dc.title | Fabrication of BaZr0.80Y0.20O3-delta Sputtering Target for Thin-Film Proton Conducting Oxides | en_US |
dc.item-type | article | en_US |
dc.contributor.department | MÜ, Mühendislik Fakültesi, Metalurji ve Malzeme Mühendisliği Bölümü | en_US |
dc.contributor.authorID | 0000-0002-5321-0381 | en_US |
dc.contributor.institutionauthor | Pişkin, Fatih | |
dc.relation.journal | RUSSIAN JOURNAL OF INORGANIC CHEMISTRY | en_US |
dc.relation.publicationcategory | Makale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı | en_US |