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dc.contributor.authorPoyraz, Mehmet
dc.contributor.authorTunay, Recai Fatih
dc.date.accessioned2020-11-20T16:50:29Z
dc.date.available2020-11-20T16:50:29Z
dc.date.issued2020
dc.identifier.issn1749-785X
dc.identifier.urihttps://doi.org/10.1504/IJSURFSE.2020.108221
dc.identifier.urihttps://hdl.handle.net/20.500.12809/6255
dc.description.abstractThe aim of this study is; to examine the effect of different sputtering parameters on coating thickness and hardness in MoS2 films which are deposition of radio frequency (RF) magnetron sputtering method. Therefore, 440C steel substrates are coated with MoS2 thin films which exhibit lubrication as a solid lubricant and low friction characteristic during shear. MoS2 films with no interlayer and (Ti/Cr) with interlayer were deposited on the AISI 440C substrates. During the coating, by changing the deposition parameters such as the substrate deposition temperature and RF sputtering power, steel disc groups which are coated in 15 different deposition parameters were obtained. The thicknesses of the films were measured by using a SEM. The surface topographies were observed at different magnifications. The composition and structure were analysed by energy dispersive spectroscopy (EDS). A nano-indentation system was used to determine the hardness and elesticity modules of the coatings. Copyright © 2020 Inderscience Enterprises Ltd.en_US
dc.description.sponsorshipSüleyman Demirel Ãœniversitesi: 4734-D2-16en_US
dc.description.sponsorshipThe authors would like to thank Süleyman Demirel University Scientific Research Projects Management Unit, who supported the project financially with the Project No. 4734-D2-16.en_US
dc.item-language.isoengen_US
dc.publisherInderscience Publishersen_US
dc.item-rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subjectFilm hardness and thicknessen_US
dc.subjectPhysical vapour depositionen_US
dc.subjectRadio frequency magnetron sputter film coatingen_US
dc.subjectThin film coatingen_US
dc.titleThe effect of different sputtering parameters on coating thickness and hardness in MoS2 coated films with and without interlayeren_US
dc.item-typearticleen_US
dc.contributor.departmenten_US
dc.contributor.institutionauthorPoyraz, Mehmet
dc.identifier.doi10.1504/IJSURFSE.2020.108221
dc.identifier.volume14en_US
dc.identifier.issue2en_US
dc.identifier.startpage117en_US
dc.identifier.endpage134en_US
dc.relation.journalInternational Journal of Surface Science and Engineeringen_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US


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